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SENTECH CO LTD icp-rie step
Icp Rie Step, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+step/icp+rie+system/10__1007_slash_s00542___018___3740___6-70-7-13
Average 90 stars, based on 1 article reviews
icp-rie step - by Bioz Stars, 2026-10
90/100 stars

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Article Title: Soft mold NanoImprint Lithography: a versatile tool for sub-wavelength grating applications
Article Snippet: In order to do so a simple ICP-RIE step is performed in a Sentech EtchLab-200 in O2 atmosphere.



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SENTECH CO LTD icp-rie step
Icp Rie Step, supplied by SENTECH CO LTD, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/icp-rie+step/icp+rie+system/10__1007_slash_s00542___018___3740___6-70-7-13
Average 90 stars, based on 1 article reviews
icp-rie step - by Bioz Stars, 2026-10
90/100 stars
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